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1. WO2022193010 - A GIMBAL BONDING TOOL AND A METHOD TO CORRECT SURFACE NON-UNIFORMITIES USING A BONDING TOOL

Publication Number WO/2022/193010
Publication Date 22.09.2022
International Application No. PCT/CA2022/050393
International Filing Date 16.03.2022
IPC
H01L 21/98 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
98Assembly of devices consisting of solid state components formed in or on a common substrate; Assembly of integrated circuit devices
Applicants
  • VUEREAL INC. [CA]/[CA]
Inventors
  • GINGRAS, Drew Robert
Agents
  • ROWAND LLP
Priority Data
63/161,71416.03.2021US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) A GIMBAL BONDING TOOL AND A METHOD TO CORRECT SURFACE NON-UNIFORMITIES USING A BONDING TOOL
(FR) OUTIL DE LIAISON À CARDAN ET PROCÉDÉ DE CORRECTION DE NON-UNIFORMITÉS DE SURFACE À L'AIDE D'UN OUTIL DE LIAISON
Abstract
(EN) The present invention discloses a method and apparatus to correct surface non-uniformities between a donor substrate and a system substrate using a bonding tool. The bonding tool has multiple segments with internal structure to facilitate the objective. In particular, arc shaped guideways and resulting movements exemplify the method.
(FR) La présente invention concerne un procédé et un appareil pour corriger des non-uniformités de surface entre un substrat donneur et un substrat de système à l'aide d'un outil de liaison. L'outil de liaison a de multiples segments ayant une structure interne pour faciliter l'objectif. En particulier, les chemins de guidage en forme d'arc et les mouvements résultants illustrent le procédé.
Latest bibliographic data on file with the International Bureau