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1. WO2021146332 - CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

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[ EN ]

CLAIMS

We claim:

1. A method of making a portion of a microfluidic channel, the method comprising:

lithographically patterning a first pattern into a first layer of photoresist disposed on a substrate, the first pattern representative of morphology of a reservoir rock;

etching the first pattern into the substrate to form a patterned substrate; disposing a second layer of photoresist onto the patterned substrate; lithographically patterning a second pattern into the second layer of photoresist to reveal portions of the patterned substrate; and

depositing calcite onto the exposed portions of the patterned substrate.

2. The method of claim 1, comprising:

generating a lithography mask according to an image of the reservoir rock; and lithographically patterning the first pattern into the first layer of photoresist using the lithography mask.

3. The method of claim 1, in which lithographically patterning the first pattern into the first layer of photoresist comprises:

exposing the first layer of photoresist to energy according to the first pattern; and developing exposed portions of the first layer of photoresist.

4. The method of claim 3, in which exposing the first layer of photoresist to an energy beam comprises exposing the first layer of photoresist to an electron beam.

5. The method of claim 1, in which etching the first pattern into the substrate comprises dry etching the first pattern into a silicon substrate.

6. The method of claim 1, in which lithographically patterning the second pattern into the second layer of photoresist comprises:

exposing the second layer of photoresist to an energy beam according to the second pattern; and

developing the exposed portions of the second layer of photoresist to reveal the portions of the patterned substrate.

7. The method of claim 6, comprising removing remaining portions of the second layer of photoresist after depositing the cal cite.

8. The method of claim 7, comprising removing the remaining portions of the second layer of photoresist by a lift-off process.

9. The method of claim 1, in which lithographically patterning a second pattern into the second layer of photoresist comprises patterning a regular geometric pattern into the second layer of photoresist.

10. The method of claim 9, in which lithographically patterning a second pattern into the second layer of photoresist comprises patterning a checkerboard pattern into the second layer of photoresist.

11. The method of claim 1, comprising depositing cal cite by atomic layer deposition (ALD).

12. The method of claim 1, in which depositing calcite onto the exposed portions of the patterned substrate comprises rendering the exposed portions of the patterned substrate hydrophobic.

13. The method of claim 1, in which portions of the patterned substrate without deposited calcite are hydrophilic.

14. The method of claim 1, comprising forming a microfluidic device including the microfluidic channel.

15. A microfluidic device comprising:

a calcite channel structure defining at least a portion of a microfluidic channel, the calcite channel structure comprising:

a substrate, a top surface of the substrate formed in a pattern representative of morphology of a reservoir rock; and a calcite coating disposed on first portions of the top surface of the substrate,

in which the first portions are hydrophobic and second portions of the top surface of the substrate are hydrophilic.

16. The microfluidic device of claim 15, comprising a housing, in which the cal cite channel structure is disposed in the housing.

17. The microfluidic device of claim 16, comprising a fluid inlet and a fluid outlet defined in the housing and in fluid communication with the microfluidic channel.

18. The microfluidic device of claim 16, comprising a window in the housing, in which the window is optically transparent or transparent to electrons or both, in which the window is aligned with at least a portion of the calcite channel structure.

19. The microfluidic device of claim 15, in which the first portions and second portions of the top surface of the substrate define a regular geometric pattern.

20. The microfluidic device of claim 19, in which the first portions and second portions of the top surface of the substrate define a checkerboard pattern.