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1. WO2022008190 - MEMS DEVICE WITH A TOUCH SENSOR ELEMENT AND PROXIMITY SENSOR ELEMENT

Publication Number WO/2022/008190
Publication Date 13.01.2022
International Application No. PCT/EP2021/066292
International Filing Date 16.06.2021
IPC
H03K 17/945 2006.1
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
KPULSE TECHNIQUE
17Electronic switching or gating, i.e. not by contact-making and -breaking
94characterised by the way in which the control signals are generated
945Proximity switches
H03K 17/96 2006.1
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
KPULSE TECHNIQUE
17Electronic switching or gating, i.e. not by contact-making and -breaking
94characterised by the way in which the control signals are generated
96Touch switches
G06F 3/043 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
3Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
01Input arrangements or combined input and output arrangements for interaction between user and computer
03Arrangements for converting the position or the displacement of a member into a coded form
041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
043using propagating acoustic waves
Applicants
  • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. [DE]/[DE]
Inventors
  • BARDHAN ROY, Rupak
  • KOCH, Sandro
  • KIRCHER, Marco
  • AMELUNG, Jörg
Agents
  • STÖCKELER, Ferdinand
  • ZIMMERMANN, Tankred
  • SCHLENKER, Julian
  • KÖNIG, Andreas
  • PFITZNER, Hannes
  • SCHAIRER, Oliver
  • BURGER, Markus
  • SCHENK, Markus
  • HERSINA, Günter
  • ZINKLER, Franz
Priority Data
10 2020 208 572.208.07.2020DE
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) MEMS-VORRICHTUNG MIT BERÜHRUNGSSENSORELEMENT UND NÄHERUNGSSENSORELEMENT
(EN) MEMS DEVICE WITH A TOUCH SENSOR ELEMENT AND PROXIMITY SENSOR ELEMENT
(FR) DISPOSITIF MEMS AVEC ÉLÉMENT CAPTEUR TACTILE ET ÉLÉMENT CAPTEUR DE PROXIMITÉ
Abstract
(DE) MEMS-Vorrichtung, mit zumindest einem Berührungssensorelement, das ausgebildet ist, um piezoelektrisch, kapazitiv, optisch oder magnetisch eine Berührung zu delektieren; und mit zumindest einem Näherungssensorelement, das ausgebildet ist, um ein Objekt, das zu dem Näherungssensorelement beabstandet ist, mit Schall zu delektieren. Das zumindest eine Berührungssensorelement und das zumindest eine Näherungssensorelement sind auf einem Halbleiterchip integriert.
(EN) The invention relates to a MEMS device comprising at least one touch sensor element configured to piezoelectrically, capacitively, optically or magnetically detect touch; and at least one proximity sensor element configured to sonically detect an object arranged at a distance from the proximity sensor element. The at least one touch sensor element and the at least one proximity sensor element are integrated on a semiconductor chip.
(FR) L'invention concerne un dispositif MEMS comprenant au moins un élément capteur tactile configuré pour détecter de manière piézo-électrique, capacitive, optique ou magnétique un contact ; et au moins un élément capteur de proximité configuré pour détecter par ultrasons un objet disposé à une certaine distance de l'élément capteur de proximité. L'au moins un élément capteur tactile et l'au moins un élément capteur de proximité sont intégrés sur une puce semi-conductrice.
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