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1. WO2021067518 - FREQUENCY DOMAIN ENHANCEMENT OF LOW-SNR FLAT RESIDUE/STAIN DEFECTS FOR EFFECTIVE DETECTION

Publication Number WO/2021/067518
Publication Date 08.04.2021
International Application No. PCT/US2020/053663
International Filing Date 01.10.2020
IPC
G01N 21/95 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
95characterised by the material or shape of the object to be examined
G01N 21/88 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
G01N 21/892 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
89in moving material, e.g. paper, textiles
892characterised by the flaw, defect or object feature examined
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
G06T 7/00 2006.01
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
Applicants
  • KLA CORPORATION [US]/[US]
Inventors
  • WU, Chaohong
  • ZHANG, Yong
Agents
  • MCANDREWS, Kevin
  • MORRIS, Elizabeth M.N.
  • SPURLOCK, Justin Delorean
Priority Data
17/016,04209.09.2020US
62/909,58202.10.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) FREQUENCY DOMAIN ENHANCEMENT OF LOW-SNR FLAT RESIDUE/STAIN DEFECTS FOR EFFECTIVE DETECTION
(FR) AMÉLIORATION DU DOMAINE FRÉQUENTIEL DE DÉFAUTS PLATS SOUS FORME DE RÉSIDUS/TACHES À FAIBLE RAPPORT SIGNAL/BRUIT POUR UNE DÉTECTION EFFICACE
Abstract
(EN)
An inspection system is disclosed. The system includes a controller communicatively couplable with an inspection sub-system configured to receive illumination from a sample and generate image data. The controller includes one or more processors configured to execute program instructions causing the one or more processors to receive the image data, wherein the image data comprises at least one image, downsample the at least one image using bicubic interpolation or bilinear interpolation, transform the at least one image from a spatial domain to a frequency domain using a Fourier transform, filter frequencies higher than a threshold frequency from the at least one image, transform the at least one image from the frequency domain to the spatial domain using an inverse Fourier transform, and detect one or more flat-pattern defects in the at least one image.
(FR)
Un système d'inspection est décrit. Le système comprend un dispositif de commande pouvant être couplé en communication à un sous-système d'inspection configuré pour recevoir un éclairage provenant d'un échantillon et générer des données d'image. Le dispositif de commande comprend un ou plusieurs processeur(s) configuré(s) pour exécuter des instructions de programme amenant le(s) processeur(s) à recevoir les données d'image, les données d'image comprenant au moins une image ; sous-échantillonner la ou les image(s) au moyen d'une interpolation bicubique ou d'une interpolation bilinéaire ; transformer la ou les image(s), d'un domaine spatial en un domaine fréquentiel à l'aide d'une transformée de Fourier ; extraire par filtrage les fréquences supérieures à une fréquence seuil de la ou des image(s) ; transformer la ou les image(s) du domaine fréquentiel en domaine spatial à l'aide d'une transformée de Fourier inverse ; et détecter un ou plusieurs défaut(s) à motif plat dans la ou les image(s).
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