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1. WO2020210243 - SYSTEMS AND METHODS FOR GENERATING A DISSOLVED AMMONIA SOLUTION WITH REDUCED DISSOLVED CARRIER GAS AND OXYGEN CONTENT

Publication Number WO/2020/210243
Publication Date 15.10.2020
International Application No. PCT/US2020/027086
International Filing Date 07.04.2020
IPC
B08B 3/02 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3Cleaning by methods involving the use or presence of liquid or steam
02Cleaning by the force of jets or sprays
B08B 3/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3Cleaning by methods involving the use or presence of liquid or steam
04Cleaning involving contact with liquid
H01L 21/67 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
CPC
B01D 19/0031
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
19Degasification of liquids
0031by filtration
B01D 19/0068
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
19Degasification of liquids
0068General arrangements, e.g. flowsheets
B01F 15/00162
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
FMIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
15Accessories for mixers ; ; Auxiliary operations or auxiliary devices; Parts or details of general application
00123Controlling; Testing; Measuring
00129Measuring operational parameters
00162Measuring pressure
B01F 15/00357
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
FMIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
15Accessories for mixers ; ; Auxiliary operations or auxiliary devices; Parts or details of general application
00123Controlling; Testing; Measuring
00331characterized by the parameter being controlled
00357Controlling pressure
B01F 15/00422
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
FMIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
15Accessories for mixers ; ; Auxiliary operations or auxiliary devices; Parts or details of general application
00123Controlling; Testing; Measuring
00331characterized by the parameter being controlled
00422Controlling the volume of at least one component to be mixed
B01F 15/0283
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
FMIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
15Accessories for mixers ; ; Auxiliary operations or auxiliary devices; Parts or details of general application
02Feed or discharge mechanisms
0266Discharge mechanism
0274characterized by the means for discharging the components from the mixer
0283using pumps
Applicants
  • MKS INSTRUMENTS, INC. [US]/[US]
Inventors
  • BRAMMER, Ulrich, Alfred
  • SEIWERT, Johannes
  • LE TIEC, Christiane
Agents
  • TERAN, Alan, S.
  • COUSINS, Abigail
  • SHALEK, James
  • BAUER, Steven
  • CONSALVI, Mary
Priority Data
62/831,13808.04.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEMS AND METHODS FOR GENERATING A DISSOLVED AMMONIA SOLUTION WITH REDUCED DISSOLVED CARRIER GAS AND OXYGEN CONTENT
(FR) SYSTÈMES ET PROCÉDÉS POUR GÉNÉRER UNE SOLUTION D'AMMONIAC DISSOUTE À TENEUR RÉDUITE EN GAZ VECTEUR DISSOUS ET EN OXYGÈNE
Abstract
(EN)
Systems and methods are described for supplying a rinsing liquid including ultrapure water and an ammonia gas. The system includes an ultrapure water source and a gas mixture source in fluid communication with a contactor. The gas mixture includes ammonia gas and a carrier gas. The system includes a control unit configured to adjust a flow rate of the ultrapure water source such that an operational pressure of the contactor remains below a pressure threshold. The system includes a compressor configured to remove a residual transfer gas out of the contactor. The contactor generates a rinsing liquid having ultrapure water and a concentration of the ammonia gas dissolved therein. The system includes a pump in fluid communication between the contactor and an outlet. The pump is configured to deliver the rinsing liquid having a gaseous partial pressure below the pressure threshold at the outlet.
(FR)
La présente invention concerne des systèmes et des procédés pour fournir un liquide de rinçage comprenant de l'eau ultra pure et un gaz ammoniac. Le système comprend une source d'eau ultra pure et une source de mélange de gaz en communication fluidique avec un contacteur. Le mélange gazeux comprend du gaz ammoniac et un gaz vecteur. Le système comprend une unité de commande configurée pour ajuster un débit de la source d'eau ultra pure de telle sorte qu'une pression opérationnelle du contacteur reste inférieure à un seuil de pression. Le système comprend un compresseur configuré pour éliminer un gaz de transfert résiduel hors du contacteur. Le contacteur génère un liquide de rinçage ayant de l'eau ultra pure et une concentration du gaz ammoniac dissous dans celui-ci. Le système comprend une pompe en communication fluidique entre le contacteur et une sortie. La pompe est configurée pour distribuer le liquide de rinçage ayant une pression partielle gazeuse inférieure au seuil de pression au niveau de la sortie.
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