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1. WO2020208085 - PLASMA SOURCE CHAMBER FOR A SPECTROMETER

Publication Number WO/2020/208085
Publication Date 15.10.2020
International Application No. PCT/EP2020/060048
International Filing Date 08.04.2020
IPC
G01N 21/73 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
71thermally excited
73using plasma burners or torches
G01J 3/443 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
443Emission spectrometry
H05H 1/46 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
24Generating plasma
46using applied electromagnetic fields, e.g. high frequency or microwave energy
CPC
G01J 3/443
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
443Emission spectrometry
G01N 21/68
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
66electrically excited, e.g. electroluminescence
68using high frequency electric fields
G01N 21/71
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
71thermally excited
G01N 21/73
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
71thermally excited
73using plasma burners or torches
G01N 2201/022
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2201Features of devices classified in G01N21/00
02Mechanical
022Casings
H01J 37/32972
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32917Plasma diagnostics
32935Monitoring and controlling tubes by information coming from the object and/or discharge
32972Spectral analysis
Applicants
  • THERMO FISHER SCIENTIFIC (BREMEN) GMBH [DE]/[DE]
Inventors
  • QUAAS, Norbert
  • MURATAZIN, Ayrat
  • GEISLER, Sebastian
  • WOLF, Tobias
  • RATHKAMP, Jan
  • WOHLERS, Dirk
  • SKOBIN, Mikhail
Agents
  • BEITSMA, G.R. (Romano)
Priority Data
1905069.910.04.2019GB
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PLASMA SOURCE CHAMBER FOR A SPECTROMETER
(FR) CHAMBRE DE SOURCE DE PLASMA DESTINÉE À UN SPECTROMÈTRE
Abstract
(EN)
A plasma source chamber (10) for use in a spectrometer comprises an inner housing (11) for accommodating a plasma source (31) and an outer housing (12) accommodating the inner housing. The outer housing (12) comprises at least one outer air inlet opening (21) in a first wall and at least one outer air outlet opening (22) in a second wall. Walls of the inner housing and walls of the outer housing define a spacing (25) so as to allow a first air flow (1) from the at least one outer air inlet opening (21) to the at least one outer air outlet opening (22) through the spacing (25) between the inner housing and the outer housing. The inner housing (11) comprises at least one inner air inlet opening (23) in a first wall and at least one inner air outlet opening (24) in a second wall to allow a second air flow (2) from the at least one inner air inlet opening to the at least one inner air outlet opening through the inner housing. Thus, an improved cooling of the outer surfaces of the plasma source chamber is achieved.
(FR)
Selon la présente invention, une chambre de source de plasma (10) destinée à être utilisée dans un spectromètre comprend un boîtier interne (11) servant à recevoir une source de plasma (31) et un boîtier externe (12) recevant le boîtier interne. Le boîtier externe (12) comprend au moins une ouverture d'entrée d'air externe (21) dans une première paroi et au moins une ouverture de sortie d'air externe (22) dans une seconde paroi. Des parois du boîtier interne et des parois du boîtier externe délimitent un espacement (25) de façon à laisser passer un premier flux d'air (1) desdites ouvertures d'entrée d'air externes (21) auxdites ouvertures de sortie d'air externes (22) à travers l'espacement (25) entre le boîtier interne et le boîtier externe. Le boîtier interne (11) comprend au moins une ouverture d'entrée d'air interne (23) dans une première paroi et au moins une ouverture de sortie d'air interne (24) dans une seconde paroi pour laisser passer un second flux d'air (2) desdites ouvertures d'entrée d'air internes auxdites ouvertures de sortie d'air internes à travers le boîtier interne. Ainsi, un refroidissement amélioré des surfaces externes de la chambre de source de plasma est obtenu.
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